微电子工业电镀槽内部流动及传质模拟
图2 带剪切板电镀槽内部流场结构（涡量模的等值面表征）时间演化动画（Tri_6a1g）
在电镀工艺中，我们更关心的是阴极附近边界层，因此分析了不同大小和间距带剪切板电镀槽阴极表面质量边界层厚度分布，如图4所示。
图4 不同大小和间距的带剪切板电镀槽阴极表面质量边界层厚度：（a）Tri_2a1g，（b）Tri_6a1g，（c）Tri_5a2g，（d）Tri_10a4g
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