背景介绍
结构设计
(c)十字型异质多芯波导的模场分布图
1. 十字型Si3N4波导的设计
(a)TE模;(b)TM模
(c)和(d)为使用150 nm厚Si波导
(a)TE模;(b)TM模
性能分析与总结
图6 光场在模斑转换器中的传输情况。
(a)对应横截面的模场分布;
参考文献:
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[2] Liang Y, Li Z, Fan S, et al. Ultra-low loss SiN edge coupler interfacing with a single-mode fiber[J]. Optics Letters, 2022, 47(18): 4786-4789.
[3] Yu Z, Yin Y, Huang X, et al. Silicon nitride assisted tri-layer edge coupler on lithium niobate-on-insulator platform[J]. Optics Letters, 2023, 48(13): 3367-3370.
[4] He A, Cui Y, Xiang J, et al. Ultra‐Low Loss SiN Edge Coupler for III‐V/SiN Hybrid Integration[J]. Laser & Photonics Reviews, 2023, 17(10): 2300100.
[5] 张立桀, 范艳晶, 胡晶晶, 等. 基于十字型异质多芯波导的硅光端面耦合器[J]. Acta Optica Sinica, 2024, 44(19): 1913001-1913001-8.